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Artificial cilia for microfluidics - s-PDMS exposure

 - rtAIM
 - Tema [+]


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Figure 4.9: Resulting s-PDMS thickness as a function of UV-exposure time, for different spin-coating speeds. At 5000rpm and 3000rpm, an exposure of 100s mostly cures the layer, but thicker layers (lower spin-coating speeds) need a much longer exposure to fully cross-link. For these samples, only 1wt% of DMPAP and 2.5wt% of xylene was used.

UV exposure time [s] Height of exposed PDMS [μm]
for spin-coating speed
1000rpm 3000rpm 5000rpm
15 2
30 13 4
60 15 11 6
120 18 14-15 8
240 22 15 8