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Artificial cilia for microfluidics - s-PDMS exposure | |||||||||||||||||||||||||||
- PolyMEMS
- rtAIM
- Tema
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Figure 4.9: Resulting s-PDMS thickness as a function of UV-exposure time, for different spin-coating speeds. At 5000rpm and 3000rpm, an exposure of 100s mostly cures the layer, but thicker layers (lower spin-coating speeds) need a much longer exposure to fully cross-link. For these samples, only 1wt% of DMPAP and 2.5wt% of xylene was used.
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