Artificial cilia for microfluidics - photoPDMS spin-coating
- PolyMEMS
- rtAIM
- Tema![[+]](/images/downarrow.png)
Figure 4.3: photoPDMS thickness as a function of spin speed for different PDMS:xylene ratios (in weight). The solid black line with no xylene is regular Sylgard-184 PDMS as shown in figure 3.3. Values for a ratio of 1:0.05 were obtained from [Bhagat et al. (2007)], other data points were measured. Each curve was fitted separately.
| spin-coating speed [rpm] | 500 | 1000 | 1500 | 2000 | 2500 | 3000 | 4000 | 5000 | |
|---|---|---|---|---|---|---|---|---|---|
| PDMS thickness [μm] for PDMS:xylene ratio |
1:0 | (see figure 3.3: Sylgard-184) | |||||||
| 1:0.05 | 70 | 55 | 24 | 15 | 13 | 11 | |||
| 1:0.15 | 59±5 | 38±4 | 28±3 | 18±6 | 8±3 | ||||
| 1:0.34 | 30±8 | 21±5 | 19±2 | ||||||
| 1:1 | 12±2 | 10±2 | 8±7 | 7±2 | |||||