Artificial cilia for microfluidics - extra material

If you are interested in photolithographic PDMS micro-fabrication, the following information may be useful.

• Figure 3.3: Sylgard-184 PDMS thickness as a function of spin speed
• Figure 4.3: photoPDMS thickness as a function of spin speed for different PDMS-xylene ratios
• Figure 4.9: s-PDMS thickness as a function of UV-exposure time